Etching, cleaning, and drying methods using supercritical fluid and chamber systems using these methods
Hyo-san Lee
Chang-Ki Hong
Kun-Tack Lee
Woo-Gwan Shim
Jeong-Nam Han
Jung-Min Oh
Kwon-Taek Lim
Ha-Soo Hwang
Yuvaraj Haldorai
Jae-Mok Jung
-
Patent No. :
US8790470B2
Filed :
15-12-2011
Published :
29-07-2014
Granted
Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods
Hyo-san Lee
Chang-Ki Hong
Kun-Tack Lee
Woo-Gwan Shim
Jeong-Nam Han
Jung-Min Oh
Kwon-Taek Lim
Ha-Soo Hwang
Yuvaraj Haldorai
Jae-Mok Jung
-
Patent No. :
US8585917B2
Filed :
15-12-2011
Published :
19-11-2013
Granted
Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods
Hyo-san Lee
Chang-Ki Hong
Kun-Tack Lee
Woo-Gwan Shim
Jeong-Nam Han
Jung-Min Oh
Kwon-Taek Lim
Ha-Soo Hwang
Yuvaraj Haldorai
Jae-Mok Jung
-
Patent No. :
US8084367B2
Filed :
23-05-2007
Published :
27-12-2011
Granted
Method for preparing a nanocomposite comprising an inorganic oxide in a conductive polymer polymerized by using supercritical carbon dioxide
Kwon Taek Lim
Yuvaraj Haldorai
Min Young Lee
Ganapathy Hullathy Subban
-
Patent No. :
KR10-2008-0855171
Filed :
09-02-2007
Published :
22-08-2008
Granted
Method for preparing core-shell type nanocomposite particles having both physical merits of an inorganic material and processability and flexibility of polymer by using supercritical carbon dioxide as a reaction solvent
Kwon Taek Lim
Eun Ju Park
Min Young Lee
Yuvaraj Haldorai
-
Patent No. :
KR10-2008-0074410
Filed :
09-02-2007
Published :
13-08-2008
Granted
Etching, cleaning and drying method using supercritical fluid and a chamber system using the same to improve productivity of an etch process by high reactivity of supercritical fluid
Lee Hyo San
Hong Chang Ki
Lee Kun Tack
Han Jeong Nam
Oh Jung Min
Shim Woo Gwan
Lim Kwon Taek
Hwang Ha Soo
Yuvaraj Haldorai
Jung Jae Mok
-
Patent No. :
KR10-2007-0113096
Filed :
05-01-2007
Published :
28-11-2007
Granted