SYSTEM, APPARATUS AND METHOD FOR MONITORING OF SURFACE PROFILE AND THICKNESS MEASUREMENT IN THIN FILMS
INDIAN INSTITUTE OF TECHNOLOGY GUWAHATI
Guwahati
Assam
IN | THE SECRETARY DEPARTMENT OF ELECTRONICS AND INFORMATION TECHNOLOGY (DEITY)
New Delhi
IN | INDIAN INSTITUTE OF TECH GUWAHATI | THE SECRETARY DEPARTMENT OF ELECTRONICS AND INFORMATION TECH DEITY
-
Patent No. :
US20200024727A1
Filed :
12-06-2018
Published :
23-01-2020
Published
SYSTEM, VORRICHTUNG UND VERFAHREN ZUR ÜBERWACHUNG EINES OBERFLÄCHENPROFILS UND DICKENMESSUNG IN DÜNNSCHICHTEN | SYSTÈME, APPAREIL ET PROCÉDÉ DE SURVEILLANCE DE PROFIL DE SURFACE ET DE MESURE D'ÉPAISSEUR DANS DES COUCHES MINCES | SYSTEM, APPARATUS AND METH
Secretary Department of Electronics and Information Technology (Deity)
New Delhi 110003
IN
101637428 | Indian Institute of Technology Guwahati
Guwahati
Assam 781039
IN
101637247
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Patent No. :
EP3387482A1
Filed :
18-07-2016
Published :
17-10-2018
Published
SYSTÈME, APPAREIL ET PROCÉDÉ DE SURVEILLANCE DE PROFIL DE SURFACE ET DE MESURE D'ÉPAISSEUR DANS DES COUCHES MINCES | SYSTEM, APPARATUS AND METHOD FOR MONITORING OF SURFACE PROFILE AND THICKNESS MEASUREMENT IN THIN FILMS
THE SECRETARY DEPARTMENT OF ELECTRONICS AND INFORMATION TECHNOLOGY (DEITY)
IN | INDIAN INSTITUTE OF TECHNOLOGY GUWAHATI
IN
-
Patent No. :
WO2017098343A1
Filed :
18-07-2016
Published :
15-06-2017
Published
用于薄膜中的表面轮廓和厚度测量的监测的系统、装置和方法 | system, device and method for monitoring surface profile and thickness measurement in the film
印度电子与信息技术部(DEITY) | 印度理工学院古瓦哈提分校 | The Secretary Department Of Electronics And Information Technology (deity)
IN | Indian Institute Of Technology Guwahati
-
Patent No. :
CN108700738A
Filed :
18-07-2016
Published :
23-10-2018
Published
SYSTEM, APPARATUS AND METHOD FOR MONITORING OF SURFACE PROFILE AND THICKNESS MEASUREMENT IN THIN FILMS
THE SECRETARY DEPARTMENT OF ELECTRONICS AND INFORMATION TECHNOLOGY (DEITY) | INDIAN INSTITUTE OF TECHNOLOGY GUWAHATI
-
Patent No. :
IN201504088I1
Filed :
12-12-2015
Published :
16-06-2017
Published