System and Method for Monitoring of Surface Profile and Thickness Measurement in Thin Films
Boruah
B.R;Khare A.;Pathak B.;Kesarwani R
-
Patent No. :
EP3387482
Filed :
18-07-2016
Published :
16-11-2022
Granted
Systems, Equipment, and Methods for Monitoring Surface Profile and / or Thickness Measurements on Thin Films
Boruah
B.R;Khare A.;Pathak B.;Kesarwani R
-
Patent No. :
JP6838075B2
Filed :
18-07-2016
Published :
15-02-2021
Granted
System, Apparatus And Method for Monitoring of Surface Profile and Thickness Measurement in Thin Films
Boruah
B.R;Khare A.;Pathak B.;Kesarwani R
-
Patent No. :
403113
Filed :
12-12-2015
Published :
05-08-2022
Granted
A Method and Device for Zonal Wavefront Sensing by Beam Splitting
Pathak B.;Boruah B.R.
-
Patent No. :
406347
Filed :
26-12-2014
Published :
12-09-2022
Granted
A Method and Device for Zonal Wavefront Sensing via Sequential Spatially Shifted Grating Array Patterns
Pathak
B.;Boruah
-
Patent No. :
510388
Filed :
18-12-2014
Published :
13-02-2024
Granted