Influence of high energy ion irradiation on structural, morphological and optical properties of high-k dielectric hafnium oxide (HfO2) thin films grown by atomic layer deposition
High-energy 120 MeV Au<sup>9+</sup> ion beam-induced modifications and evaluation of craters in surface morphology of SnO<inf>2</inf> and TiO<inf>2</inf> nanocomposite thin films
Authors: Kumar, V.; Gupta, R.; Chauhan, V.; Ram, J.; Singh, P.; Prasad, M.; Mehra, R.; Kumar, R.
High energy (150 MeV) Fe<sup>11+</sup> ion beam induced modifications of physico-chemical and photoluminescence properties of high-k dielectric nanocrystalline zirconium oxide thin films