PATTERNED PLATINUM SILICON SUBSTRATES FOR REALIZING PIEZOELECTRIC MEMS DEVICES
Varadarajan Elangovan
Manikandan Chandramohan
Kathiresan Mayakoothan
Santhakrishnan
Natarajan Venkatachalam
-
Application No. :
ERIP/IP/2201064/M/01
Filed :
09-12-2022
Published :
30-11--0001
Filed
PIEZOELECTRIC SINGLE CRYSTAL TRANSDUCER ELEMENT AND A METHOD FOR ITS MANUFACTURING
Varadarajan Elangovan
Manikandan Chandramohan
Natarajan Venkatachalam
Vijayakumar
Sarguna
Edward
Ganesamoorthy
Chandrashekar
R.I. Absekaraj
-
Application No. :
ERIP/IP/2201065/M/01
Filed :
09-12-2022
Published :
30-11--0001
Filed